Introduction
Guest lecture: Veljko Milanovic

Lateral resonators: springs, combs, and resonance
capacitive accelerometers: capacitive sensing and force feedback

Deposition: Spin casting, Thermal oxidation, LPCVD, Sputtering, ion imp.
Etching: wet, plasma, XeF2, Williams etch table

Bulk micromachining: crystal planes, anisotropic etchants, boron doping
Bulk examples: "standard", 110 etching, 111 (Dan Cho) etching

Surface micromachining: sacrificial etching, wafer bonding
2 layer processes: MUMPS process flow, pin joints, hinges

Beam Theory I: moment/deflection, common spring configurations
Beam Theory II: torsional deflection, matrix representation, simple trusses

Electrostatics: basic theory
Electrostatic instability: gap and finger pull-in, bistable actuators

Thermal actuators: force/deflection, response time, power consumption
More actuators: magnetic, piezoelectric, ...

Electrostatic actuators: combs, gap-closers, rotary motors, inchworms
Suspension design: non-linearity, cross-axis coupling, buckling/bistable

Fluids and damping: viscous flow, pipes and channels, 
	Couette, squeeze-film, surface tension
Microfluidics: pumps, valves, diffusion, mixers
Resonance: Rayleigh's method

Assembly
CAD

Process integration
CMOS from a mechanical perspective: Parameswaran and Fedder

Micro robots
Electronic interfaces

Noise
Packaging
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Material Properties: stress/strain, TCE, TCR, gauge factor
Semiconductors
Alometry
2 accelerometers: piezoresistive, capacitive