| Instructor
Office Hours |
Kristofer S.J. Pister
pister@eecs <-- easiest method of contact 512 Cory Hall Tu 3-4, W 10:30-11:30, and by email appointment |
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| Required Texts | None | |||||||||
| Suggested references
Most/all of these should now be on reserve at the engineering library |
Transducers 91 conference proceedings ($10 in 471 Cory if you want
one)
Elwenspoek & Jansen, Silicon Micromachining Jaeger, Introduction to Microelectonic Fabrication Kovacs, Micromachined Transducers Sourcebook Madou, Fundamentals of Microfabrication Ristic, Sensor Technology and Devices Sze, Semiconductor Sensors |
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| Grading |
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| Homework | Will emphasize design, layout, and simulation of devices and systems
Collaboration is encouraged! |
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| Project | Writeup is due the last week of class. Four pages max, two column
format, no exceptions!
Collaboration is encouraged. |
| Week | Date | Topic | HW |
| 1 | 8/24
8/26 |
Introduction: what is MEMS?
Basic IC fabrication: Deposition, Lithography, Etch |
|
| 2 | 8/31
9/2 |
Single mask processes
Guest lecture: Prof. Roger Howe, UCB EECS |
|
| 3 | 9/7
9/9 |
LPCVD, thermal oxidation, metalization
Guest lecture: Prof. Liwei Lin, UCB M.E. |
HW1 |
| 4 | 9/14
9/16 |
plasma etching
wet etching, intro to bulk micromachining |
|
| 5 | 9/21
9/23 |
bulk micromachining
Material properties: modulus of elasticity, resistivity, thermal conductivity, thermal expansion, ... Semiconductor materials |
HW2 |
| 6 | 9/28
9/30 |
Beam theory | HW3 |
| 7 | 10/5
10/7 |
Electrostatics | HW4 |
| 8 | 10/12
10/14 |
Damping: Couette, squeeze-film
Resonators: linear systems, Q, nonlinear effects |
HW5 |
| 9 | 10/19
10/21 |
Cronos/MUMPS process flow
2 layer devices: sliders, pin joints, hinges |
|
| 10 | 10/26
10/28 |
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| 11 | 11/2
11/4 |
CMOS from a mechanical perspective
piezoresistivity |
HW6 |
| 12 | 11/9
11/11 |
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| 13 | 11/16
11/18 |
Noise | |
| 14 | 11/23
11/25 |
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| 15 | 11/30
12/2 |
Applications: inertial sensors, relays, micro-photonics |
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