| Instructor
Office Hours |
Kristofer S.J. Pister
pister@eecs <-- easiest method of contact 512 Cory Hall Th 2-3, F 9-10, and by email appointment |
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| Required Texts | Senturia, Microsystem Design | |||||||
| Suggested references
Most/all of these should now be on reserve at the engineering library |
Transducers 91 conference proceedings ($10 in 471 Cory if you want
one)
Elwenspoek & Jansen, Silicon Micromachining Jaeger, Introduction to Microelectonic Fabrication Kovacs, Micromachined Transducers Sourcebook Madou, Fundamentals of Microfabrication Ristic, Sensor Technology and Devices Sze, Semiconductor Sensors |
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| Grading |
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| Homework | Will emphasize design, layout, and simulation of devices and systems
Collaboration is encouraged! Cheating is not! |
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| Project | Writeup is due the last week of class. Four pages max, two column
format, no exceptions!
Collaboration is encouraged. |
| Week | Date | Topic | HW |
| 1 | 8/29
8/31 |
Introduction: what is MEMS?
Basic IC fabrication: Deposition, Lithography, Etch |
HW1 |
| 2 | 9/5
9/7 |
Single mask processes | HW2 |
| 3 | 9/12
9/14 |
LPCVD, thermal oxidation, metalization | |
| 4 | 9/19
9/21 |
plasma etching
wet etching, intro to bulk micromachining |
|
| 5 | 9/26
9/28 |
bulk micromachining
Material properties: modulus of elasticity, resistivity, thermal conductivity, thermal expansion, ... Semiconductor materials |
|
| 6 | 9/28
9/30 |
Beam theory | |
| 7 | 10/3
10/5 |
Electrostatics | |
| 8 | 10/10
10/12 |
Damping: Couette, squeeze-film
Resonators: linear systems, Q, nonlinear effects |
|
| 9 | 10/17
10/19 |
Cronos/MUMPS process flow
2 layer devices: sliders, pin joints, hinges |
|
| 10 | 10/24
10/26 |
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| 11 | 10/31
11/2 |
CMOS from a mechanical perspective
piezoresistivity |
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| 12 | 11/7
11/9 |
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| 13 | 11/14
11/16 |
Noise | |
| 14 | 11/21
11/23 |
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| 15 | 11/28
11/30 |
Applications: inertial sensors, relays, micro-photonics |
Missing from above list: