EE 245 Intro to MEMS Design

Fall 2000

Final project turn-in page.

Class info, homework questions, etc.:  news:ucb.class.ee245
Lectures available on the web:  http://media2.bmrc.berkeley.edu/bibs/archive.cfm?prog=89&group=20
Common MEMS acronyms.
Here's the Project assignment.
 
Instructor 
 

Office Hours

 Kristofer S.J. Pister 
pister@eecs <-- easiest method of contact 
512 Cory Hall 
Th 2-3, F 9-10, and by email appointment
Required Texts Senturia, Microsystem Design
Suggested references 

Most/all of these should now be on reserve at the engineering library

 Transducers 91 conference proceedings ($10 in 471 Cory if you want one) 
Elwenspoek & Jansen, Silicon Micromachining
Jaeger, Introduction to Microelectonic Fabrication
Kovacs, Micromachined Transducers Sourcebook
Madou, Fundamentals of Microfabrication
Ristic, Sensor Technology and Devices
Sze, Semiconductor Sensors
Grading
Homework 40%
Project 30%
Final (+possible midterm) 30%
 
Homework Will emphasize design, layout, and simulation of devices and systems 
Collaboration is encouraged!  Cheating is not!
Project Writeup is due the last week of class.  Four pages max, two column format, no exceptions! 
Collaboration is encouraged.


Schedule
Week Date Topic HW Solutions/
Grades
1 8/29
8/31		 Introduction: what is MEMS?
Basic IC fabrication: Deposition, Lithography, Etch		 HW1 hw1SIDs
2 9/5
9/7		 Single mask processes HW2 contest photos
hw2SIDs
3 9/12
9/14		 LPCVD, thermal oxidation, metalization
plasma etching		 HW3
4 9/19
9/21
wet etching, intro to bulk micromachining		 HW4
5 9/26
9/28		 bulk micromachining
Material properties: modulus of elasticity, resistivity, thermal conductivity, thermal expansion, ...
Semiconductor materials		 Project
6 9/28
9/30		 Beam theory HW5
7 10/3
10/5		 Electrostatics HW6
8 10/10
10/12		 Damping: Couette, squeeze-film
Resonators: linear systems, Q, nonlinear effects
9 10/17
10/19		 Cronos/MUMPS process flow
2 layer devices: sliders, pin joints, hinges
10 10/24
10/26		 Electrostatic actuators
11 10/31
11/2		 Thermal actuators
Lateral resonators		 HW7
12 11/7
11/9		 Guest lecture: Dorian Liepmann on microfluidics
Resonance
13 11/14
11/16		 Rayleigh's method
Nonlinear beams, suspension design
14 11/21
11/23		 Sensing and noise
15 11/28
11/30		 Applications: inertial sensors, relays, micro-photonics

Missing from above list: