(Message inbox:8) Return-Path: sunil@bsac.eecs.berkeley.edu Received: from alpaca.eecs.berkeley.edu (alpaca.EECS.Berkeley.EDU [128.32.244.153]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id XAA05872 for ; Wed, 21 Jun 2000 23:39:33 -0700 (PDT) Received: from relay.EECS.Berkeley.EDU ([169.229.34.228]) by alpaca.eecs.berkeley.edu (8.9.1a/8.9.3) with ESMTP id XAA17499 for ; Wed, 21 Jun 2000 23:39:33 -0700 (PDT) Received: from hexsil.EECS.Berkeley.EDU (hexsil.EECS.Berkeley.EDU [128.32.156.169]) by relay.EECS.Berkeley.EDU (8.9.3/8.9.3) with ESMTP id XAA02175 for ; Wed, 21 Jun 2000 23:39:32 -0700 (PDT) Date: Wed, 21 Jun 2000 23:39:34 -0700 (PDT) From: Sunil Bhave X-Sender: sunil@hexsil.EECS.Berkeley.EDU To: "Prof. Kris Pister" Subject: Re: mems curriculum Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII Content-Length: 1117 Hi Kris, My responses follow 1) What things should every BSAC PhD know (or at least know where to look up)? (e.g. linear beam theory, Petersen's paper, Kovacs' nickname ...) linear beam theory, electrostatics, MCNC process flow, basic fluidics. 2) What are good questions for a MEMS prelim (i.e. what are the deeper questions that a student should be able to answer after studying hard)? Derive the equation for Dynamic Pull-in (assuming the student has learned static pullin in 290G) 3) If they were offered when you first showed up, which courses from the above list would you take/have taken in the course of your PhD work? Introduction to MEMS Mechanics, Dynamics, and Mechanisms in MEMS Microfluidics 4) If they were offered right now, which of the above courses would you take next year? Mechanics, Dynamics, and Mechanisms in MEMS Microfluidics 5) What other MEMS courses would you like to see offered? the above collection is good enough 6) What reference texts do you find most useful? (e.g. Horowitz and Hill; Roark & Young) Bill Clark's Thesis 290G Lecture Notes Roark & Young Sunil. (Message inbox:17) Return-Path: gmd@xcell.EECS.Berkeley.EDU Received: from alpaca.eecs.berkeley.edu (alpaca.EECS.Berkeley.EDU [128.32.244.153]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id QAA17484 for ; Thu, 22 Jun 2000 16:34:28 -0700 (PDT) Received: from xcell.EECS.Berkeley.EDU ([128.32.156.93]) by alpaca.eecs.berkeley.edu (8.9.1a/8.9.3) with ESMTP id QAA10795 for ; Thu, 22 Jun 2000 16:34:26 -0700 (PDT) Received: from localhost (gmd@localhost) by xcell.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id QAA12865; Thu, 22 Jun 2000 16:34:25 -0700 (PDT) Date: Thu, 22 Jun 2000 16:34:25 -0700 (PDT) From: George Dougherty To: Kris Pister cc: gmd@bsac.EECS.Berkeley.EDU Subject: Re: mems curriculum In-Reply-To: <200006202237.PAA09042@bellini.EECS.Berkeley.EDU> Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII Content-Length: 4579 Kris - my comments are down below the questions . . . On Tue, 20 Jun 2000, Kris Pister wrote: > With 9 faculty and 90+ graduate students, it may be time to start thinking > about a MEMS curriculum. I would like to see four or five graduate > courses in MEMS, cross-listed in several departments, with interdepartmental > MEMS prelims augmenting the existing prelim options for our students. > One possibility would allow the students to select from the list below > two or three courses on which to be examined. > > Some candidates: > *Introduction to MEMS - some combo of my course and Liwei's > *MEMS Device Fabrication > *MEMS Device Fabrication Lab - in the microlab, on the equipment students use > *Mechanics, Dynamics, and Mechanisms in MEMS > *Microfluidics > *BioMEMS > *OptoMEMS > > Independent of whether you think MEMS prelims or a MEMS curriculum is a > good idea, please fill in the brief survey below. Just a word or two is > fine, or a 10 page treatise, but please do respond. I'll post all responses > (anonymously). > > Any other general or specific feedback is welcome. Thanks! > > ksjp > =========================================================================== > 1) What things should every BSAC PhD know (or at least know where to look up)? > (e.g. linear beam theory, Petersen's paper, Kovacs' nickname ...) > ee290G (aka 245) did a good job of covering the basics. One thing is that the topics covered in these MEMS courses are usually a strong function of the background of the instructor. Likewise, what's needed by the students is often a strong function of their background. For instance in 245 I snoozed through the beam theory, but the electrostatics and noise theory were new to me. There needs to be a canonical curriculum with an interdisciplinary focus, and an interdisciplinary TEXT to go with it. Madou is the best out there that I know of, but maybe not set up as a textbook. > 2) What are good questions for a MEMS prelim (i.e. what are the deeper > questions that a student should be able to answer after studying hard)? > The questions should be on the canonical topics. There is great danger here that the prof's pet area/major will get overemphasized at the expense of other areas that could be more relevant to the student. I would restrict prelim questions to electrostatics (comb drive force, etc), beam theory, fabrication concepts, etc. kind of like the 245 tests. > 3) If they were offered when you first showed up, which courses from the > above list would you take/have taken in the course of your PhD work? They all sound great. After being around a while though, I'd be leery of taking many of them b/c aside from 245 (and even that a little) the MEMS courses which have been taught are all fluffy seminar-type courses, not real technical courses. > > 4) If they were offered right now, which of the above courses would you take > next year? ANy of the last three, at first sight. But they better have some content and not just be "pick a paper you like and talk about it with the class" or "here's what some people are doing, pretty cool huh?" In the area of microfluidics I'd cover creeping flow and low reynolds number fluid mechanics, lots of surface tension physics, some fluid mechs of porous media, bubble mechanics, diffusion, electrokinetics, and a few other things. Current research topics can be shown in the first and last weeks. > > 5) What other MEMS courses would you like to see offered? > A course on electronics / signal processing and control is badly needed for those of us that come from a non-EE background. The existing undergraduate EE courses in this area are logistically impractical for grad students who need to get some practical knowledge in a hurry. EE105, etc are not really relevant. EE145 might be okay, and ME102 or other mechatronics courses, but they are all heavily based on labs with lab partners, etc., huge burdensome lab reports, and are targetted toward the undergrad who has nothing else to do but go to class. Physics has a practical electronics (informal) course for their grad students - BSAC might have one too. Signal conditioning and drive electronics for resonators, sensors, etc. should be covered such that I can put together a circuit board to drive my devices or collect data by the end of the course. > 6) What reference texts do you find most useful? > (e.g. Horowitz and Hill; Roark & Young) > Madou. Other than that they depend on the application area (fluid mechanics, solid mechanics, etc etc). > (Message inbox:25) Return-Path: ajay@newton.berkeley.edu Received: from alpaca.eecs.berkeley.edu (alpaca.EECS.Berkeley.EDU [128.32.244.153]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id KAA09897 for ; Mon, 26 Jun 2000 10:16:27 -0700 (PDT) Received: from newton.berkeley.edu ([128.32.142.2]) by alpaca.eecs.berkeley.edu (8.9.1a/8.9.3) with ESMTP id KAA31058 for ; Mon, 26 Jun 2000 10:16:25 -0700 (PDT) Received: (from ajay@localhost) by newton.berkeley.edu (8.9.3/8.9.3) id KAA20207; Mon, 26 Jun 2000 10:16:25 -0700 (PDT) Date: Mon, 26 Jun 2000 10:16:24 -0700 (PDT) From: Ajay Anil Deshmukh To: Kris Pister Subject: Re: mems curriculum In-Reply-To: <200006202237.PAA09042@bellini.EECS.Berkeley.EDU> Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII Content-Length: 2012 > =========================================================================== > 1) What things should every BSAC PhD know (or at least know where to look up)? > (e.g. linear beam theory, Petersen's paper, Kovacs' nickname ...) As a microfluids person, my linear beam theory consists of whatever I haven't forgotten since junior year of college. I think for those of us in fluids, we don't know a lot about the concerns of inertial sensor or optics guys. We do know a lot about processing, but a MEMS curriculum shouldn't be wedded to traditional silicon processing. And of course a lot of other fluids (esp. Bio) people are big into polymer and other chemistry which is another field I (and I'm guessing inertial sensor and optics people) don't know much about. Having said that, I think it would be difficult to make a MEMS program be applicable to everyone. You could, however, stick with a program that was good for poly-si mechanical parts people and others (like me) could take a class or two that was useful. > > 2) What are good questions for a MEMS prelim (i.e. what are the deeper > questions that a student should be able to answer after studying hard)? Similar answer as above. Depends what the MEMS program is about. Of course, no one has to take the MEMS prelim, so you could tailor it to poly-si guys, and other MEMS people would take other prelims instead. > > 3) If they were offered when you first showed up, which courses from the > above list would you take/have taken in the course of your PhD work? Fab & Fab Lab Microfluidics (probably) and Biomems (possibly) but I think these two could be combined. > > 4) If they were offered right now, which of the above courses would you take > next year? If there was a combined Microfluids and BioMEMS class, I would look into it. > > 5) What other MEMS courses would you like to see offered? > > 6) What reference texts do you find most useful? > (e.g. Horowitz and Hill; Roark & Young) > MEMS for Dummies > (Message inbox:10) Return-Path: rembe@bsac.eecs.berkeley.edu Received: from alpaca.eecs.berkeley.edu (alpaca.EECS.Berkeley.EDU [128.32.244.153]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id NAA13391 for ; Mon, 26 Jun 2000 13:08:36 -0700 (PDT) Received: from relay.EECS.Berkeley.EDU ([169.229.34.228]) by alpaca.eecs.berkeley.edu (8.9.1a/8.9.3) with ESMTP id NAA04209 for ; Mon, 26 Jun 2000 13:08:34 -0700 (PDT) Received: from lovelace (lovelace.EECS.Berkeley.EDU [169.229.34.167]) by relay.EECS.Berkeley.EDU (8.9.3/8.9.3) with ESMTP id NAA28587 for ; Mon, 26 Jun 2000 13:08:34 -0700 (PDT) From: rembe@bsac.eecs.berkeley.edu Message-Id: <200006262008.NAA28587@relay.EECS.Berkeley.EDU> To: Kris Pister Date: Mon, 26 Jun 2000 13:12:58 -0700 MIME-Version: 1.0 Content-transfer-encoding: 7BIT Subject: Re: mems curriculum Return-receipt-to: rembe@bsac.eecs.berkeley.edu Priority: normal In-reply-to: <200006202237.PAA09042@bellini.EECS.Berkeley.EDU> X-mailer: Pegasus Mail for Win32 (v3.12a) Content-Transfer-Encoding: 7BIT Content-Type: text/plain; charset=US-ASCII Content-Length: 2299 different manufacturing processes On 20 Jun 00, at 15:37, Kris Pister wrote: > With 9 faculty and 90+ graduate students, it may be time to start > thinking about a MEMS curriculum. I would like to see four or five > graduate courses in MEMS, cross-listed in several departments, with > interdepartmental MEMS prelims augmenting the existing prelim options > for our students. One possibility would allow the students to select > from the list below two or three courses on which to be examined. > > Some candidates: > *Introduction to MEMS - some combo of my course and Liwei's > *MEMS Device Fabrication > *MEMS Device Fabrication Lab - in the microlab, on the equipment > students use *Mechanics, Dynamics, and Mechanisms in MEMS > *Microfluidics *BioMEMS *OptoMEMS > > Independent of whether you think MEMS prelims or a MEMS curriculum is > a good idea, please fill in the brief survey below. Just a word or > two is fine, or a 10 page treatise, but please do respond. I'll post > all responses (anonymously). > > Any other general or specific feedback is welcome. Thanks! > > ksjp > ====================================================================== > ===== 1) What things should every BSAC PhD know (or at least know > where to look up)? > (e.g. linear beam theory, Petersen's paper, Kovacs' nickname ...) - fabrication processes - crystallography - MEMS physics - MEMS modeling (e.g. Lagrange, beam theory, RITZ for beam dynamics, FEM) - MEMS device characterization - Model identification, simulation, and optimization > 2) What are good questions for a MEMS prelim (i.e. what are the deeper > questions that a student should be able to answer after studying > hard)? Questions about: Nonlinear effects, control theory, high frequency effects in circuits > > 3) If they were offered when you first showed up, which courses from > the above list would you take/have taken in the course of your PhD > work? Introduction to MEMS > > 4) If they were offered right now, which of the above courses would > you take next year? MEMS device Fabrication > > 5) What other MEMS courses would you like to see offered? MEMS characterization and optimization > > 6) What reference texts do you find most useful? > (e.g. Horowitz and Hill; Roark & Young) > > (Message inbox:20) Return-Path: wlindsay@newton.Berkeley.EDU Received: from alpaca.eecs.berkeley.edu (alpaca.EECS.Berkeley.EDU [128.32.244.153]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id LAA08348 for ; Thu, 6 Jul 2000 11:05:41 -0700 (PDT) Received: from newton.berkeley.edu ([128.32.142.2]) by alpaca.eecs.berkeley.edu (8.9.1a/8.9.3) with ESMTP id LAA22925 for ; Thu, 6 Jul 2000 11:05:41 -0700 (PDT) Received: from newton.me.berkeley.edu (comb-l.ME.Berkeley.EDU [128.32.14.89]) by newton.berkeley.edu (8.9.3/8.9.3) with ESMTP id LAA23119 for ; Thu, 6 Jul 2000 11:05:40 -0700 (PDT) Message-ID: <3964C99A.FC6CAC53@newton.me.berkeley.edu> Date: Thu, 06 Jul 2000 11:02:02 -0700 From: Bill Lindsay X-Mailer: Mozilla 4.73 [en] (WinNT; U) X-Accept-Language: en MIME-Version: 1.0 To: Kris Pister Subject: Re: mems curriculum References: <200006202237.PAA09042@bellini.EECS.Berkeley.EDU> Content-Transfer-Encoding: 7bit Content-Transfer-Encoding: 7bit Content-Type: text/plain; charset=us-ascii Content-Length: 2467 I'm just an MS, but here goes Kris Pister wrote: > With 9 faculty and 90+ graduate students, it may be time to start thinking > about a MEMS curriculum. I would like to see four or five graduate > courses in MEMS, cross-listed in several departments, with interdepartmental > MEMS prelims augmenting the existing prelim options for our students. > One possibility would allow the students to select from the list below > two or three courses on which to be examined. > > Some candidates: > *Introduction to MEMS - some combo of my course and Liwei's > *MEMS Device Fabrication > *MEMS Device Fabrication Lab - in the microlab, on the equipment students use > *Mechanics, Dynamics, and Mechanisms in MEMS > *Microfluidics > *BioMEMS > *OptoMEMS > > Independent of whether you think MEMS prelims or a MEMS curriculum is a > good idea, please fill in the brief survey below. Just a word or two is > fine, or a 10 page treatise, but please do respond. I'll post all responses > (anonymously). > > Any other general or specific feedback is welcome. Thanks! > > ksjp > =========================================================================== > 1) What things should every BSAC PhD know (or at least know where to look up)? > (e.g. linear beam theory, Petersen's paper, Kovacs' nickname ...) > Beams, basic material science, microfab techniques, where the library is and how to read the journals, how to do a job search, manners, wit > > 2) What are good questions for a MEMS prelim (i.e. what are the deeper > questions that a student should be able to answer after studying hard)? > Lengthscale interactions, like Liepmann-esque dimensional analysis. "What forces are more significant in a MEMS firehose; viscosity of water, or density of water?" Process flow diagnosis. "After doing process ABCDEFG we found that our devices were fubar in this way. Which step(s) in the process was/were wrong and how do you fix it?" > > 3) If they were offered when you first showed up, which courses from the > above list would you take/have taken in the course of your PhD work? Heck, all of 'em, but I'm just that type. > > 4) If they were offered right now, which of the above courses would you take > next year? > OptoMEMS and FabLab > > 5) What other MEMS courses would you like to see offered? > All the above > > 6) What reference texts do you find most useful? > (e.g. Horowitz and Hill; Roark & Young) I don't have a strong opinion on this. Bill (Message inbox:570) Return-Path: aseshia@eecs.berkeley.edu Received: from eecs3.EECS.Berkeley.EDU (eecs3.EECS.Berkeley.EDU [169.229.60.164]) by robotics.EECS.Berkeley.EDU (8.9.1a/8.9.1) with ESMTP id RAA03232 for ; Sun, 17 Sep 2000 17:16:41 -0700 (PDT) Received: from EECS.Berkeley.EDU (localhost.EECS.Berkeley.EDU [127.0.0.1]) by eecs3.EECS.Berkeley.EDU (8.9.3/8.9.3) with ESMTP id RAA25001 for ; Sun, 17 Sep 2000 17:16:41 -0700 (PDT) Received: from cory.EECS.Berkeley.EDU (cory.EECS.Berkeley.EDU [128.32.134.240]) by EECS.Berkeley.EDU (8.9.3/8.9.3) with ESMTP id RAA24995 for ; Sun, 17 Sep 2000 17:16:40 -0700 (PDT) Received: from localhost (aseshia@localhost) by cory.EECS.Berkeley.EDU (8.8.8/8.8.8) with ESMTP id RAA12447 for ; Sun, 17 Sep 2000 17:16:40 -0700 (PDT) X-Authentication-Warning: cory.EECS.Berkeley.EDU: aseshia owned process doing -bs Date: Sun, 17 Sep 2000 17:16:40 -0700 (PDT) From: "Ashwin A. Seshia" To: Kris Pister Subject: Re: mems curriculum In-Reply-To: <200006202237.PAA09042@bellini.EECS.Berkeley.EDU> Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII Content-Length: 2978 Dear Prof. Pister, I first started drafting this email a couple of months back - but somehow never got a chance to complete it till now - I hope the feedback is still useful. I think that having a MEMS curriculum with courses that complement each other rather than overlap significantly (as ME219 & EE245 currently do) is a very good idea. It might also be a good idea to identify core ME and EE courses which already exist at the upper-level undergraduate level and provide a strong foundation for graduate courses in MEMS (eg. EE143, EE140, ME courses on beam theory, vibrations, CE course in engineering mechanics etc.) However, designing a MEMS prelim atleast for EE students may be difficult considering the vast knowledge base overlapping different disciplines that is required and the fact that the prelim is typically taken at the end of the first year. The course outline below sounds good. I am not sure if BioMEMS and OptoMEMS would have enough material to constitute graduate courses by themselves - but a course on MEMS devices broadly covering all these areas(incl.others such as Inertial MEMS, MEMS for communication, data storage etc.) would be good. Microfluidics and BioMEMS could potentially be combined into a single course(with a prerequisite upper level course in fluid dynamics). > Some candidates: > *Introduction to MEMS - some combo of my course and Liwei's > *MEMS Device Fabrication > *MEMS Device Fabrication Lab - in the microlab, on the equipment students use > *Mechanics, Dynamics, and Mechanisms in MEMS > *Microfluidics > *BioMEMS > *OptoMEMS > > 2) What are good questions for a MEMS prelim (i.e. what are the deeper > questions that a student should be able to answer after studying hard)? > This is not easy with MEMS covering a lot of ground in different areas. The possible syllabus could include the Intro. to MEMS course + a list of papers (as is done for CS prelims) eg. silicon as a mechanical material by peterson and other seminal papers in the field. The questions could be designed to extend some of the concepts in these papers based on the knowledge obtained from the above curriculum + basic physics + EE. > 3) If they were offered when you first showed up, which courses from the > above list would you take/have taken in the course of your PhD work? > Most of them, except maybe the mems device fabrication course if I had already taken EE143. > 4) If they were offered right now, which of the above courses would you take > next year? > Again, all of them except the intro. course and the fab. course (which I have already taken) > 5) What other MEMS courses would you like to see offered? > I think that the above list is a great start. Perhaps, a course on (not neccessarily microscale) systems enabled by MEMS might be interesting. > 6) What reference texts do you find most useful? > (e.g. Horowitz and Hill; Roark & Young) > > Kovacs - Micromachining Transducers Sourcebook. BSAC PhD theses.