AC alternating current ADC analog to digital converter ADI Analog Devices, Inc. AGC automatic gain control AMOS active micro optical system AO adaptive optics ASE Anisotropic Silicon Etch ASIC application specific integrated circuit ASML deep UV lithography tool made by ASM Lithography Holding BBR breathing bar resonator BHF buffered hydrofluoric acid BPF band pass filter BSAC Berkeley Sensor & Actuator Center BWRC Berkeley wireless research center CAD computer aided design CAD coronary artery disease CCR corner cube reflector CD critical dimension CFD computational fluid dynamics CMOS Complementary Metal Oxide Semiconductor CMP chemical mechanical polish CPL capillary pumped loop CRT cathode ray tube CVD chemical vapor deposition DAC digital to analog converter DARPA defense advanced research projects agency DC direct current DETF double ended tuning fork DLP Digital Light projection DM deformable mirror DMD digital micromirror device DNA deoxyribonucleic acid (sp?) DO dissolved oxygen DOE design of experiments DOE department of energy DOF degrees of freedom DOF depth of focus DPIV digital particle image velocimetry DRIE deep reactive ion etch DSP digital signal processor DUV deep ultravioloet (light) EDP ethylene-diamine-pyrocatechol EDS energy dispersive spectroscopy EPD electrophoretic deposition ESV electrostatic voltmeter FDTS 1H,1H,2H,2H-perfluorodecyltrichlorosilane FED field emission device FED field emission display FET field effect transistor FPS frames per second FPW flexural plate wave FSPIV forward scattering particle image velocimetry FTE full time equivalent HF Hydrofluoric acid HIV human immunodeficiency virus HPF high pass filter IAB industrial advisory board IC integrated circuit ICP inductively coupled plasma INFOMD integrated near field microfluidic devices IOP intraocular pressure IPA India pale ale IPA isopropyl alcohol IPO initial public offering JFET junction field effect transistor KOH potassium hydroxide LBNL Lawrence Berkeley National Lab LED light emitting diode LPCVD low pressure chemical vapor deposition LPF low pass filter LTO low temperature oxide MAV micro air vehicle mCIA microscale confocal imaging arrays MEMS micro engines move squat (Kovacs) MUMPS multi user MEMS process service NFO near-field optical NSOM near-field scanning optical microscope OTS octadecyl trichlorosilane (sp?) PDMS polydimethylsiloxane PECVD plasma enhanced chemical vapor deposition PIV particle image velocimetry PK ? PLL phase locked loop PMMA polymethylmethacrylate (acrylic) POEMS polymer opto electro mechanical systems PCB printed circuit board PDS parylene deposition system PSG phosphosilicate glass PTO lead titanate PVDF polyvinylidene fluoride PZT lead zirconate titanate RAM random access memory RF radio frequency ROG resonant output gyroscope RTA rapid thermal annealing RXL resonant accelerometer SALT steered agile laser transceivers SAM self assembled monolayer SAMPLES Sandia Agile MEMS Prototyping, Layout Tools, Education, and Services SEM scanning electron microscope/micrograph SIM stress induced martensite SMA shape memory alloy SNOM scanning near field optical microscopy SNL Sandia National Lab SoC System on a Chip SOE silicon on epoxy SOI silicon on insulator SRAM static random access memory STEC staggered torsional electrostatic combdrive STS surface technology systems, manufacturer of our DRIE etcher SUMMiT Sandia Ultra-planar, Multi-level MEMS Technology TEOS tetraethylorthosilicate Si(OC2H5)4 TMAH tetramethylammonum hydroxide TOS tensile optical surface UAV unmanned air vehicle UCB University of California, Berkeley UHMWPE ultra high molecular weight polyethylene VCO voltage controlled oscillator XL accelerometer XMAS Christmas